Hirata 晶圓傳送機器人-真空型 Vacuum Type Robot
具備高潔淨度、高精度、高速生產性晶圓傳送機器人-真空型
1
2
產品特色
- Flexible combination of arm length, arm type develops various robot specifications to satisfy your request.
- High performance ferromagnetic fluid unit provides the lowest leakage rate.
- Airtight ferromagnetic fluid seals and mesh filter realize total particle-free condition.
- New encoder adopted to eliminate encoder data backup battery.
- Transferring with high repeatability and high speed makesultimate throughput performance.
產品資訊
-
原廠名稱
平田 -
製程名稱
WLCSP/Ceramic e-WLB(Fan out)/Flip Chip/Wafer Bumping -
英文名稱
Vacuum Type Robot -
產品細目
真空型晶圓傳送機器人
