Hirata 晶圓傳送機器人-大氣型 Atmospheric Type Robot
具備高潔淨度、省空間、高速生產性晶圓傳送機器人-大氣型
1
2
產品特色
- Small footprint does not disturb down flow in the clean room.
- High performance robot achieves higher through-put.
- Wafer turner option allows you to process reverse side of wafer.
- New encoder adopted to eliminate encoder data backup battery.
- 940mm Z-axis achieved by telescopic bodystructure added to lineup.
- It supports 450mm of the large-diameter wafer from a small diameter.
產品資訊
-
原廠名稱
平田 -
製程名稱
WLCSP/Ceramic e-WLB(Fan out)/Flip Chip/Wafer Bumping -
英文名稱
Atmospheric Type Robot -
產品細目
大氣型晶圓傳送機器人
