GL 晶圆表面有机污染物分析系统
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产品特色
- A silicon wafer can be analyzed keeping its complete form.
- Each component can be qualified individually out of numberous organic compounds on the silicon wafer surface by means of gas chromatography
- Less than a few pg/cm2 trace organic compound on the wafer surface can be analyzed
产品信息
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原厂名称
G.L. Sciences -
制程名称
SMT -
英文名称
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产品细目
其他